

| 
 | 測量面對基面的垂直 | 測量面平面度或直線度 | 基準(zhǔn)平面度或直線度 | ||||||
| 精度等級um | |||||||||
| 1 | 2 | 3 | 1 | 2 | 3 | 1 | 2 | 3 | |
| 200×200 | 8 | 16 | 30 | 4 | 8 | 16 | 6 | 12 | 24 | 
| 300×200 | 10 | 20 | 40 | 5 | 10 | 20 | 8 | 16 | 30 | 
| 300×300 | 10 | 20 | 40 | 5 | 10 | 20 | 8 | 16 | 30 | 
| 400×300 | 12 | 24 | 45 | 6 | 12 | 24 | 10 | 20 | 40 | 
| 400×400 | 12 | 24 | 45 | 6 | 12 | 24 | 10 | 20 | 40 | 
| 500×400 | 14 | 28 | 50 | 7 | 14 | 28 | 12 | 24 | 48 | 
| 500×500 | 14 | 28 | 50 | 7 | 14 | 28 | 12 | 24 | 48 | 
| 800×600 | 18 | 35 | 60 | 9 | 18 | 35 | 14 | 28 | 55 | 
| 1000×800 | 25 | 50 | 70 | 12 | 24 | 45 | 18 | 35 | 70 | 
| …… | 
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